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NCF
Events
1.UIC OPEN HOUSE
These gatherings are targeted towards prospective students who are
currently either high school seniors or are considering transferring
from a community college.
Open House
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2.Serpentine Resistor Fabrication Workshop
Through this workshop, the trainees can learn and hand-on practice MEMS
process including metal deposition, photolithography, isotropic etch,
and microstructure characterization. In the workshop, metal film was
previously deposited on glass wafers, followed by photoresist spinning
and softbake. Photolithography is then introduced and practiced.
Development and metal etch is performed with linewidth microscopic
inspection at each step. When the resistors are fabricated, the height
of the metal lines is measured by contact profilometer, and the
resistances of the serpentine resistors with different parameters are
measured and compared with the theoretical value.
Workshop
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3.Microfluidics Workshop
Through this workshop, the trainees can learn and hand-on practice
microfluidics process including negative resist photolithography, PDMS
replication technique, microstructure characterization, and a
demonstration of micro-particle delivery. In the workshop, SU8 2025 is
coated and pre-baked on glass wafers. Photolithography is then
introduced and practiced. PEB treatment and development are performed
with linewidth microscopic inspection. PDMS replication is then
performed and treated, followed by optical profilometer
characterization.
The patterned PDMS sheets are then treated by plasma and bonded with a
flat PDMS to form microfluidics channels. A simple setup is built with
the microchannels and then delivery of micro-particles is inspected by
microscope.
Micro
fluidics Workshop Picture Gallery
4.E-beam Lithography & Scanning Electron
Microscopy Training
We offer training of Scanning Electron Microscopy (SEM) and e-beam
lithography (EBL) with a new equipped facility-Raith e_LiNE. The
training includes PMMA EBL resist preparation, SEM image, sample
coordinate establishment, writing field alignment, and e_LiNE pattern
design software, parameter setting and development.
EBL/SEM
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