NCF - Nanotechnology Core Facility

Name	Location	Available Manuals/Forms
AFM - Nanoscope III SPM	Characterization Bay	Multimode SPM Training Notebook Multimode SPM Manual Command Reference Manual

Blue M Inert Gas Furnace	ERF 3024	Blue M Manual Blue M Profile Form

Dicing Saw	ERF 3024	Dicing Saw Manual Dicing Saw Parameter Form Nickel Alloy Hubbed Blades Resin Hubless Blades

E-Beam Lithography	ERF B21	Bilayer PMMA 950C5/495C5 Lift-Off Process Manual Raith E-Line Step By Step Exposure Guide Raith Quick-start Guide

Masks Design and Conversion	3024 & 3064 ERF	NCF mask rules/guidelines using Autocad [by Alan Feinerman] Basic Layer 0 see description PG Job Request Form The Complete Mask Generating Procedure Manual [by Elina Kasman] By Artwork Conversion Software (manufacturer's manuals)*: DXF to Pattern Generator DXF to GDSII Bidirectional Translator Design Rules Polyworks User Interface Polyworks Manual Polyworks Datasheet GDSVU Manual (viewer only)

MA6 Mask Aligner	Photolithography Bay	MA6 Mask Aligner Manual

MJB3 Mask Aligner	Photolithography Bay	MJB3 Mask Aligner Manual
Nikon Microscope	Photolithography Bay	Image Capturing Manual NEW
Parylene Deposition System	ERF 3024	Parylene Deposition System Manual Parylene Specifications and Properties (by SCS)

Oxidation/Diffusion Furnace	East*	Microcontroller Coding Sheet Oxidation Example Bruce Oxidation Furnace

Optical Profilometer	Characterization Bay	Optical Profilometer Manual

Oxford DRIE	Cleanroom	Oxford DRIE Manual

Rapid Thermal Processing (RTP)	3024 ERF	RTP Manual

Tencor P-1 Long Scan Profiler	Characterization Bay	Tencor P-1 Manual

Varian Evaporation System	East*	Varian Manual

STS310 PECVD	East*	Process Guideline

STS-AOE Process Request Form		STS Request Form