MEMS Workshops and Seminars @ NCF

If you are interested in any of NCF's workshops/seminars, please contact Hongjun Zeng hzeng@uic.edu. Please check the trainings schedule for specific process or piece of equipment. Trainings and workshops are scheduled upon request, unless stated otherwise. Seminar and workshop announcements are posted via CAMNA mailing system. Hands-on Short MEMS Workshops [follow the links to see equipment used] 3 hour Photolithography/Etch Hands-on Demo Scheduled each second Wednesday of the month. 1-day Fabricate Metal "Snake" Resistors 2-day Fabricate Mold and PDMS Stamp 2-day Fabricate Si3N4 membranes 2-day Fabricate Mold and Parylene Stamp 5-day Fabricate Micro-IR lamps on Si3N4 Membranes All workshops have a minimum of 3 persons, and maximum of 6 (the maximum will depend on the student backgrounds). We will repeat classes as often as necessary to accommodate the demand in the region. The costs are: 3 hour demo is FREE but contributions are welcome [suggested contribution: $100 non-profit, $200 industrial] 1-day $400 non-profit; $800 industrial 2-day $700 non-profit; $1,400 industrial 5-day $1,500 non-profit; $3,000 industrial   "Introduction to MEMS/Nano Technology" Lecture For those who want to learn the basics of MEMS and Nano fabrication technology. The course can be tailored to specific needs, ranging from 1 to 4 hours, covering the processes in different depth. The cost will be quoted upon request. Minimum of 10 persons. Please contact Hongjun Zeng hzeng@uic.edu for more information.

MEMS Related Courses at UIC ECE 346 Solid State Device Theory ECE 347 Integrated Circuits Engineering ECE 449 Microdevices and Micromachining Technology CME 463 Materials for MEMS ChE 494 Fundamentals and Design of Microelectronic Processing ECE 540 Physics of Semiconductor Devices ECE 541 Microelectronic Fabrication Techniques ECE 544 Advanced Theory and Technology of Devices

MEMS workshops details: FREE 3 hour Photolithography/Etch Hands-on Demo During this mini-workshop students will perform simple photolithography and wet etch sequence. The mini-workshop is scheduled each second Wednesday of the month. 1-day Fabricate Metal "Snake" Resistors Cleanroom basics and chemical safety E-beam metal evaporation Mid-UV photolithography Wet isotropic etching Contact and/or Optical profilometry Dicing [optional] 2-day Fabricate Mold and PDMS Stamp Cleanroom basics and chemical safety Mid-UV thick resist photolithography Linewidth measurement Optical profilometry Thick film thickness measurement Preparation of PDMS mixture, and mold PDMS curing 2-day Fabricate Si3N4 membranes Cleanroom basics and chemical safety LPCVD low-stress nitride deposition Thin film thickness measurement Thin film stress measurement Mid-UV photolithography Linewidth measurement Reactive Ion Etching Anisotropic silicon etch Contact and Optical profilometry 2-day Fabricate Mold and Parylene Stamp Cleanroom basics and chemical safety Mid-UV thick resist photolithography Linewidth measurement Optical profilometry Thick film thickness measurement Parylene C deposition Contact profilometry 5-day Fabricate Micro-IR lamps on Si3N4 Membranes Cleanroom basics and chemical safety Wafer cleaning Thermal oxidation Thin film thickness measurement Thin film stress measurement E-beam metal evaporation Mid-UV photolithography Linewidth measurement LPCVD low-temperature oxide deposition Wet etch Anisotropic silicon etch Reactive Ion Etching Contact and Optical profilometry Dicing Electrical Testing of devices