Friday, September 05, 2008
   

Equipment Status

Equipment Nickname Year Purchased Status Reliability ** Comments
AFM1993 *up90 % up
Blue M Oven1997up98 % upMonitor temperature program carefully during each run.
CHILLER1990up97 % up
CVC1991up93 % up
Dicing Saw1991 *up98 % upSaw #1 is UP. Saw #2 is down due to a blade shaft problem.
Diffusion Furnaceup99 % up
Ellipsometer1991 *up99 % up
Fairweather Hot Plateup100 % up
Headway Spinnerup100 % up
Irvine Microscopeup100 % up
KOH Bath (large)1995up100 % up
LPCVD Nitride Tube 31990 *up79 % upNew Dichlorosilane cylinder as of 3/31/08.
LPCVD Poly/LTO Tube 21990 *up79 % up
MA6 Mask Aligner2002up99 % up
Metricon Prism Coupler1991up100 % up
MJB3 Mask Aligner1990 *up100 % up
Nikon Microscope1992up100 % up
Oxford DRIE for Silicon2000up91 % upKnowles quartz tube/5 inch clamp /08/13/08
Oxidation Furnace1996 *up92 % up
Particle Counter1990up100 % up
Parylene (New System) 2001up99 % up
Parylene Deposition System1997up98 % up
Pattern Generator1990 *down74 % upInconsistant operation / stage lockup
PECVD1991 *up95 % up
Probe Stationup100 % up
Raith E-Beam Lithography System2005up96 % up
RIE1991up98 % up
RTP Furnace2002down97 % upPC board failure.
Sigma Hot Plate2002up100 % up
Stepper1990 *up97 % up
STS DRIE for Silicadown67 % upFaulty senors, drive motor, electronics, quartz components.
Tencor Flexus1997coming soon!Instrument is no longer available.
Tencor P-1 Profiler1991up96 % upMultiply by appropriate calibration factor posted on P-1. 1.5 - 2.5 micron radius stylus is installed.
Thermionics 2002 *up100 % up
Toxic gas Monitorup100 % up
Vacuum Leak Detectorup100 % up
Varian1993 *up96 % up
Wire Bonderup100 % upProduction tool: Call Lab Manager to discuss application.
Yamato ovenup100 % up

Average age1995*Average reliability  95 % up


(*)Equipment was purchased in a refurbished condition. Pattern Generator and stepper were manufactured ~1978, and 1969 respectively.

(**) Statistics are calculated from 10/10/01

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E-mail: jsautn2@uic.edu