NCF - Nanotechnology Core Facility

Wafers and other supplies our users need can be purchased from the NCF. A few selected supplies can be purchased by our users.
We're sure that all users can get lower prices on these supplies. We are only providing them as a service when emergencies come up.
If you are interested in these supplies, please contact Bob Lajos lajos@ece.uic.edu or Hongjun Zeng hzeng@uic.edu (for AFM tips only).

AFM tapping mode probes	$50
AFM tips contact mode (NP-S)	$20
Gel-Pak box for AFM tips	$7
Mask box (fits 30 4" masks)	$30
Mask box (for 5" masks)	$120
Mask single holder 4"	$6
Mask single holder 5"	$8
Cleanroom Notebook 5.5X8.5IN	$8
Cleanroom Notebook 8.5X11IN	$18
Single wafer holders 3" (each)	$3
Single wafer holders 3" (pack of 5)	$10
Cover for single wafer holder 3"	$3
Cover for single wafer holder 3" (pack of 5)	$10
Pyrex wafers 3" (1mm thick)	$30
Pyrex wafers 3" (20mil thick)	$30
Scriber, Diamond (for glass and silicon)	$20
Tweezers stainless steel	$25
Tweezers Teflon coated	$35
Wafers 2" <111> SSP	$5
Wafers 3" <100> two-side polished	$20
Wafers 4" <100> prime	$25
Cleanroom Papers(1 pack of 250)	$25
G-1000 Copper Gaskets(10 inch dia)	$60
Glass Wafers	$10
Mask Paltes(4x4 inch)	$18
Mask Paltes(5x5 inch)	$30
Photo Mask Paltes(5x5 inch)	$22
Wafer Box(3 inch)	$10
Wafer Box(4 inch)	$20
Wafer Carrier(100 mm)	$5
Wafer Tweezers	$35
Mask Paltes(5x5 inch)	$30

The NCF will provide the following STANDARD chemicals, gases and targets:

Photolithography:
HMDS, HMDS solvent, and resist/developer/stripper for Shipley 1818, AZ 5214E, SU8-2025.

Wet etches:
Chrome etch, Aluminum etch, BOE 6:1, Hydrogen Peroxide (30%), Phosphoric Acid, Nitric Acid (70%), Sulfuric Acid (90%), Hydrochloric Acid (37%), Hydrofluoric Acid (49%), Toluene, Isopropyl, Alcohol, Methanol, Acetone

Varian e-beam targets:
Al, Ti, Cr, Cu, Au, Ni, Ag and Pt
(extra fees are charged for precious metal use)

CVC sputtering targets:
Cr, Al, Al/Si 98/2%, Mo, W, Ti, Nb, Si, carbon, Si3N4, SiO2, Al2O3, TiO2, and V205.

Gasses:
O2, N2, N2O, Ar, SiH4, SiH4/Ar, H2, NH3, WF6

STS - PECVD / RIE System - Available Gas Inputs
(Note: all gases are not available simultaneously)

PECVD
1. Nitrogen (N2)
2. Tetrafluoromethane + 18% Oxygen ((CF4 (Freon 14) + 18%O2))
3. Nitrous Oxide (N2O)
4. Ammonia (NH3)
5. Silane 2% (SiH4)

RIE
1. Nitrogen (N2)
2. Tetrafluoromethane + 18% Oxygen ((CF4 (Freon 14) + 18%O2))
3. Sulfur Hexafluoride (SF6)
4. Methane (CH4)
5. Hydrogen (H2)
6. Dichlorodifluoromethane ((CCL2F2 (Freon 12)) (Gas must be ordered)
7. Argon (Ar)
8. Helium + Oxygen (He + O2) (Gas must be ordered)
9. Oxygen (O2)
10. Chlorine (CL2) (Gas must be ordered)
11. Fluoroform ((CHF3 (Freon 23))
12. Silicon Tetrachloride (SiCL4)(Gas must be ordered)
13. Nitrogen Trifluoride (NF3) (Gas must be ordered)

If you think any other supplies should be offered to NCF users, please contact Hongjun Zeng hzeng@uic.edu